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(Pause, cont.)
[Summary]
Figure 27 to Figure 33 the alarm will indicate that the current operation is paused.
The screen will display the [Run Status] including the time elapsed from the start
of the pause. A message “Information=” may be displayed in the screen, Figure 33.
See [Supplement] below for details.
“Continue” key will shift the screen to the original status, and resume the operation.
For example, in Figure 30 Process was paused at pette #12 and the operation will
resume on pette #12. “Cancel” key will shift the screen to Figure 34. “No” key
will return to the previous screen. “Yes” key will forward to Figure 3.
[Operation Key]
(Figure 27) to (Figure 33)
Alarm Off: Stop beep sound
Continue: Return to the original screen and operation is resumed
Cancel: To Figure 34
(Figure 34)
Yes: To Figure 3
No: To previous screen
[Supplement]
At the time of operation failure, the instrument will automatically pause and
various warning message will be displayed on the screen. Even though operation
can resume, if causes of failure remain, the instrument will pause again. Please call
Service Representative for additional assistance.
The following are examples of alarm messages:
o Example) “Information=D. Open”
“D. Open” indicates that the door is open after the start of run operation. Press
“CONTINUE” key after the door is closed.
o Example) “Information =C1 L”
“C1 L” indicates failure from both sides of head part of carrier drive or sensor
failure. After you confirm the status, press “CONTINUE” key and check the
status.
o Example) “Information =C1 H”
“C1 H” indicates failure from both sides of head part of carrier drive or sensor
failure. After you confirm the status, press “CONTINUE” key and check the
status.
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