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Chapter 2 Operation
2-10
2.5 Source Setup
The SQC-122c controls deposition rate by varying the control voltage to an external
evaporation (source) supply. The previous illustration for sensor wiring also shows
source supply wiring.
The SQC-122c control voltage output range is set in the Systems Params menu. For
the supply connected to Output 1, set Scale 1 to the control voltage that corresponds to
100% output on the source supply. The SQC-122c uses 0 volts as 0% output, and the
programmed value as 100% output. Scale values from –10 volts to 10 volts are
possible.
If you find that very small changes in control voltage yield large changes in deposition
rate, you can lower the Scale value to decrease the dynamic range. Also, each Film
has a Max Power and Slew Rate parameter that may be used to customize response to
that film.