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3-19
Descriptions of each System Parameter follows:
Period: Sets the measurement period between .1 second (10 readings per second) and
1 second. A longer period gives higher reading accuracy, especially in low rate and low
density applications.
Period Frequency
(seconds) Resolution (Hz)
.1 .3
.25 .12
.5 .06
.75 .04
1 .03
System Tooling: Adjusts for overall sensor deposition rates that differ from the
measured substrate deposition rate.
Xtal Tool 1-2: Adjusts for sensor deposition rates that differ from the measured
substrate deposition rate, because of sensor location. If the rate/thickness reading is
low, then increase the tooling value. If the rate/thickness reading is high, then lower the
tooling value
Simulate Mode: Normal mode uses the quartz crystals as inputs to the SQC-122c for
PID calculations and source output control. Simulate mode simulates the quartz
crystals based on the crystal frequencies set on this. Simulate mode is useful for
debugging process recipes.
Min/Max Frequency: The frequency values for the quartz crystal sensors used as
inputs to the SQC-122c. The maximum frequency should be set to the frequency of a
new crystal, typically 6MHz. Sensor readings outside the min/max values cause an
error.
Scale 1 -2: The input voltage required by the deposition source power supply to
produce 100% output power. Positive or negative Scale 1,2 values are possible.
Pocket Relay: Select Single to assign a single relay to each source pocket. Select
Multi to allow relays to represent the BCD encoded value of the selected pocket.
For example, assume that a film has its Pocket parameter set to 3. In I/O Setup, set
Relay 1, 2, & 3 to Pocket 1, 2, & 3. Then if this parameter is set to Single, Relay 3 will
close when deposition begins. If this parameter is set to Multi then Relays 1 & 2 will
close (representing a binary 3).
Dev Graph Limit: Sets the upper limit for the Rate Deviation graph Y axis.