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Table of Contents
Chapter 1 Quick Start
1.0 Introduction................................................................................................1-1
1.1 Thin Film Process Overview........................................................................1-1
1.2 System Connections...................................................................................1-2
1.3 Front Panel................................................................................................1-3
1.4 Rear Panel ................................................................................................1-4
1.5 Installation.................................................................................................1-5
1.6 Process Setup ...........................................................................................1-6
1.7 Depositing a Film .......................................................................................1-8
Chapter 2 Operation
2.0 Introduction................................................................................................2-1
2.1 Definitions..................................................................................................2-1
2.2 Defining a Film...........................................................................................2-1
2.3 Defining a Process .....................................................................................2-5
2.4 Sensor Setup .............................................................................................2-7
2.5 Source Setup .............................................................................................2-10
2.6 Running a Process.....................................................................................2-11
2.7 Loop Tuning...............................................................................................2-15
2.8 Troubleshooting .........................................................................................2-17
Chapter 3 Menus
3.0 Introduction................................................................................................3-1
3.1 Main Menu.................................................................................................3-2
3.2 Next Menus ...............................................................................................3-4
3.3 Quick Setup Menu......................................................................................3-5
3.4 Process Menus ..........................................................................................3-7
3.5 Film Menus ................................................................................................3-11
3.6 System Parameters Menu...........................................................................3-18
3.7 I/O Setup. ..................................................................................................3-21
Chapter 4 Options
4.0 Introduction................................................................................................4-1
4.1 Options Cards............................................................................................4-1
4.2 Full Rack Extender Installation....................................................................4-1