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Chapter 2 Operation
2-11
2.6 Running a Process
Once a Process is defined with the desired Layers, and the sensors and source supply
are properly connected, the deposition process is ready to run. The next section, on
Loop Tuning, describes a method for initial process startup and optimization. This
section describes the steps to select, start, and stop a process.
Note: It is best (and safest!) to place the SQC-122c in Simulate mode when a process
is first run. If the bottom SoftKey does not show Start Simulate, press System Params
and turn Simulate ON.
To select a process, the status bar must be showing Phase: Stopped. If any other
phase is displayed, press the Abort SoftKey.
Press Process Menu, then use the scroll knob to highlight the desired process. If the
third SoftKey shows Edit when a process is highlighted, then it is already the current
process. Otherwise, press Select to set the highlighted process as the current process.
You can press Edit to review the current process layers and their associated films.
Press Main Screen to return to the main operating screen.
Press Quick Setup to review the most commonly adjusted parameters for the first layer
of the process. Press Next Layer to review each layer in the current process.
Fnl Thk
I Term
D Term
Sensor 1
Sensor 2
Output
Max. Power
Slew Rate
Material Aluminum
10.0
76.0
Out1
On
On
0.0
0.7
0.101
%
%
Out1/Out2
On/Off
On/Off
Sec.
Sec.
kA
RATE(A/s)
0.0
Quick Setup Menu
Prev
Layer
Next
Layer
Exit to
Main
Edit
THICKNESS(kA)
0.000
POWER(%)
0.0
My Process 1 -> Layer 1-> Aluminum
Parameter Value Units
Init Rate
11.1 A/s
P Term 50 None
Press Exit to Main to return to the main operating screen.